Pre-Grant Publication Number: 20090077150
Filing Date: September 18, 2007
Inventors: Amy Wendt
Assignee: Wisconsin Alumni Research Foundation
Current U.S. Classification: 708, 708/404000, 156/345280
View Prior Art for Claim 00004
The device of Claim 1, wherein the first waveform is selected to produce an ion energy distribution that provides a desired etch selectivity for the substrate.
